电弧离子镀阴极靶材起弧控制电路的设计及仿真

摘要

为了清除电弧离子镀接触式引弧容易造成引弧针与靶材粘连的问题 ,文中采用新式的引弧针非接触式高压脉冲引弧方式优化了阴极靶材的起弧结构 .论述了控制电路的实现方案 ,进行了绝缘栅双极型晶体管的驱动电路、多谐振荡器、电压比较电路的设计,对控制电路环节的性能进行了仿真测试 ,制作了电路PCB板并对其进行了检测 .仿真与实验结果表明:在初次引弧和靶材熄弧时能够生成高压脉冲 ,而在引弧稳定后可以关闭脉冲信号 ,符合设计需要 ,镀膜工作时能够保持靶源电弧的持续稳定 ,稳定性较高 ,达到预期效果 .%In order to remove the problem in arc ion plating that contact arc strike is easy to cause the adhesion between arc needle and target .The cathode target arc structure is optimized .The new arc needle——non-contact voltage pulse arc strike is used .The implementation scheme of control circuit is discussed .The drive circuit of insulated gate bipolar transistor ,multivibrator and voltage comparison circuit are designed .The performance of control circuit link is simulated and tested .The PCB of arc ignition circuit is made and tested .The experimental and simulation results show that :When the first time arcing and the extinguish of arc ,the high voltage pulses can generate ;After the arc is stable ,the pulse signal can close ,which meet the design needs .System is able to maintain the target arc steady when coating works ,it has high stability and achieves the expected effect .