微波等离子体化学气相沉积金刚石光谱分析

摘要

采用等离子体光谱分析微波等离子体化学气相(MPCVD)沉积金刚石过程中基团的空间分布及甲烷浓度变化时基团浓度的变化情况.实验过程中分别测量了氢原子的Hα(656.19nm)、Hβ(486.71nm)和Hγ(434.56nm)谱线,以及基团CH(431.31nm)、C2(515.63nm)谱线.结果表明:氢原子和基团CH、C2的浓度沿等离子体柱的径向先增加再减小.随着甲烷浓度逐步增加,氢原子及基团CH、C2的浓度相应增加,其中C2基团所受影响最大.%Optical emission spectroscopy was used to analyse the space distribution and variation with methane concentration of the radicals, which appeared in the microwave plasma for diamond deposition. In experiment, Hα(656. 19 nm),Hβ(486.71 nm)and Hγ(434.56 run) of atomic hydrogen and radicals of CH( 431. 31 nm) and C2(515.63 nm) were measured respectively. The results show that the intensities of atomic hydrogen and radicals of CH and C2 increase and then decrease along the radical direction of the plasma column, the intensities of atomic hydrogen and radicals of CH and C2 increase with the increasing of the methane concentration,in which the radical C2 is effected most.