PMLSM直接驱动工作台的机电耦合有限元建模

摘要

The dynamic characteristics of feed worktable directly driven by permanent magnet linear synchronous motor（PMLSM） and supported by linear rolling guide will directly affect the machining accuracy of super-precision numerical control machine tool.With taking both worktable and PMLSM mover as the research object,the electromechanical coupling dynamics model of the worktable system was established by adopting the Lagrange-Maxwell equation.The thrust and normal forces of PMLSM were calculated with finite element method（FEM）.The modal analysis and harmonic response analysis under the effect of electromagnetic force were performed for the worktable model,and the modal parameters and the frequency response curves in both horizontal and normal directions of worktable system were obtained.The vibration of worktable can be predicted through analyzing the frequency response curves,which provides the basis for the optimal design and control of worktable system.%由于使用永磁直线同步电动机直接驱动,直线滚动导轨支承的进给工作台的动力学特性对超精密数控机床的加工精度会产生直接影响.以工作台和电动机动子作为研究对象,利用拉格朗日-麦克斯韦方程建立工作台系统的机电耦合动力学模型.采用有限元方法计算出永磁直线同步电动机的推力和法向力,对工作台模型进行模态分析与电磁力作用下的谐响应分析,得到工作台系统的模态参数和水平、垂直两个方向的频响曲线.通过分析频响曲线可对工作台的振动进行预测,为工作台系统优化设计和优化控制提供了依据.