Research and Development Center for Solid State Lighting;
Institute of Semiconductors;
Chinese Academy of Sciences;
Beijing 100083;
China;
Center of Materials Science and Optoelectronics Engineering;
University of Chinese Academy of Sciences;
Beijing 100049;
China;
Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application;
Beijing 100083;
China;
State Key Laboratory of Solid-State Lighting;
Beijing 100083;
China;
AlN; epitaxial lateral overgrowth; growth front evolution; 2D and 3D growth modes; MOCVD;