CNTs微悬臂梁光热特性研究

摘要

Dynamic photo-thermal-mechanical response of the micro-cantilever with CNTs absorption layer illuminated by an intensity modulated infrared laser source is investigated.The one dimensional state equations of time-dependent temperature and deflection are established to analyze the dynamic characteristics.The CNTs microcantilever was fabricated using the meth-ods of the vacuum filtration and MEMS processing.The DFB laser with the wavelength of 1392nm was employed as the excita-tion source and the oscillatory properties are worked out.Experimental results indicate that amplitude decreases as the laser pulse frequency increases but it will increase as the laser output power declines with the maximal cut-off frequency of 173Hz, and at last by use of the CNTs microcantilever as the photo-thermal sensor the photo-thermal spectral signal is produced.%研究了红外脉冲激光照射下碳纳米管(CNTs)微悬臂梁的光热特性。首先，基于热传导模型建立了微悬臂梁动态温度状态方程和振动方程；然后采用真空抽滤和 MEMS加工方法制备了 CNTs 微悬臂梁；再采用波长为1392 nm的DFB激光器作为激励光源测量得到微悬臂梁的振动特性。实验结果表明，微悬臂梁振幅随频率增加而减小，其最大截止频率约为173Hz；最后采用CNTs微悬臂作为热传感器测量得到水蒸气的光热光谱信号。