PREFERRED ORIENTATION OF DEPOSITED TiC COATING ON STEEL BY CVD

摘要

Investigation was made of the deposited rate,surface morphology and crystal pre-ferred orientation of the dense TiC coating onto austenitic stainless steel in relationwith CH₄/TiCl₄ mole ratio and temperature adopted in CVD processing. When theCH₄/TiCl₄ ratio is low or high,the preferred orientation may be（220）or（200）,respec-tively,which is mainly dependent on the equilibrium concentration of active C in vapourphase.