水平震荡机械研磨对酸性镀铜微观结构的影响

摘要

The mechanical attrition (MA) was supplied in a traditional acid electroplating process of copper by the horizontal rolling and sliding of glass balls on the sample surface with a special vibrating frequency. The effects of vibrating frequency on the microstructure, grain refinement, deposition rate, porosity, as well as corrosion resistance in 3.5 ％ (mass fraction) NaCl solution of the mechanical attrition enhanced electroplating(MAEE) were analyzed by SEM, XRD and AutoLab. The results show that, compared with the traditional electroplated(TEP) Cu coating, significant grain refinement,reduced porosity and enhanced corrosion resistance are exhibited for the MAEE Cu coatings. When the vibrating frequency is arranged in 1.0-4.0Hz, the change of frequencies has no obvious influence on the grain refinement of MAEE coatings. And when the frequency is set to 2. 0Hz or 3.0Hz, due to the inhomogeneous MA of the balls, the properties of MAEE Cu coatings are inferior to those prepared at 1.0-4.0Hz, but still much better than TCP coating. The mechanism of horizontal vibrating frequency on the MAEE process was discussed.%在传统酸性镀铜液中加入玻璃球,玻璃球以不同频率在试样表面滚动-滑动形成机械研磨(MA).利用SEM,XRD和AutoLab考察震荡频率对机械研磨增强镀层(MAEE)的微观结构、晶粒尺寸、沉积速率、孔隙率和在3.5%NaCl(质量分数)溶液中耐蚀性的影响.结果表明,与传统镀层(TEP)相比,水平震荡MA可显著减小TEP镀层的晶粒尺寸和孔隙率,显著提高TEP镀层的耐蚀性.在1.0～4.0Hz范围内,改变频率对MAEE镀层晶粒细化的影响不明显,当震荡频率为2.0Hz和3.0Hz时,由于MA的不均匀性,使MAEE镀层的性能下降,但仍明显优于TCP镀层.讨论了水平震荡频率对MAEE微观结构的影响机理.