声表面波对基片表面黏弹薄膜的响应特性分析

摘要

理论分析了声表面波（SAW）对沉积在压电基片表面的黏弹薄膜的响应特性，建立了分析SAW传播特性的数值仿真模型。采用有限元数值模拟方法研究了SAW对黏弹薄膜质量负载和黏弹性的定量响应规律，发现SAW信号的振幅衰减和中心频率相对变化率可随黏弹薄膜质量负载和黏弹性的改变而发生敏感且单调的变化。%The response of surface acoustic wave (SAW) propagation to the viscoelastic film deposited on the substrate surface was investigated theoretically. The numerical simulation model for analyzing SAW propagation was established. Using finite elementmethod, the quantitative response relationship was numerically analyzed of SAW propagation to mass loading and viscoelasticity of viscoelastic film deposited on the surface of the piezoelectric substrate. It is found that both the amplitude attenuation and the rela⁃tive change rate of center frequency of SAW propagation change sensitively and monotonically with change in mass loading and vis⁃coelastic behavior of the viscoelastic film.