RAMAN谱研究在退火和镍衬底上金刚石形核中甲烷的影响

摘要

藉助SEM和MICRO-RAMAN,我们研究了在退火和在镍衬底上金刚石形核中甲烷CH4的影响.CH4的浓度分别为0%,0.5%,1.5%和2.5%,其中当甲烷浓度为1.5%时,金刚石在镍衬底上金刚石形核密度为3×108/cm2,这个结果高于以前的结果.金刚石膜的质量是好的.%The effect of CH4 for density and quality of diamond nuclei on nickel substrates arestudied by SEM and Micro-Raman in the high-temperature annealing process. If we change theconcentration of CH4: 0.5 %, 1.5 %6 and 2.5 %, the quality of diamond nuclei will be im-proved, in which the 1.5% CH4 concentration is found to be best fit for diamond to nucleate 3× 108/cm2 on nickel substrates. the density of diamond nuclei is higher than the density of nu-clei on nickel substrates in previous works and the quality of diamond is good.