介绍了自行研制的国内首条宽幅(1 250 mm)“空到空、卷对卷”结构连续真空镀膜生产线,并在铜(铝)带材上连续沉积钛基选择性吸收涂层.通过反应气体的分压控制,实现多级溅射法制备多层膜系过程中各单层膜厚和组分的精确控制,强化了吸收层间的干涉效应,改善了涂层的光学性能,同时保证了工艺过程的稳定性和可重复性,涂层的吸收率为(95±2)％,发射率为(5±2)％.%Titanium based spectrally selective absorption coatings are continuous production on copper/aluminum strip using the first "air to air,roll to roll" continuous coatings line(1250mm width)in China developed by ourselves.By reactive gas partial pressure control,we realize precise control of single-layer thickness in multistage sputtering process,enhance interference effects between the absorbing coatings,and then improve coating optical properties.Meanwhile,the stability and reproducibility of the process are ensured.High solar absorptance of (95±2)％ has been achieved with low thermal emittance of (5±2)％.
展开▼
