电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究

摘要

Ni-Cu-Zn ferrite inductor film was fabricated by screen print technology, and its performances were in-vestigated. XRD results suggest that the as-prepared thin films exhibit the same crystalline structure. The results show that after introducing of ferrite film, the inductance increases by 30%, the quality factor is improved, and the resonance frequency decrease. Ferrite inductor thin films annealed at 400℃ exhibit an optimum performance with high quality at 50 MHz, inductance increased by 27%, the quality factor increased by 39%.%采用丝网印刷技术制备Ni-Cu-Zn铁氧体电感器薄膜,并对其性能进行了表征.XRD分析表明,铁氧体薄膜具有相同的晶格结构.研究结果表明,在引入了铁氧体薄膜后,电感器的电感量相对于空心电感器有30％左右的提高,品质因数依频率不同有所改善,共振频率有所降低,经400℃后处理的薄膜电感器在低频时性能最好,50 MHz时电感量提高了27％,品质因数提高了39％.