为了解决氧化钌(RuO2)沉积电位过高, 难以在三维微结构金属集流体上直接沉积的问题, 提出采用分步电沉积方法在微三维结构镍(Ni)集流体上制备 RuO2复合膜电极, 即先在三维微结构 Ni 集流体上沉积聚吡咯/氧化石墨烯(PPy/GO)薄膜作为基底, 经热处理后, 在基底上二次沉积出RuO2颗粒, 最后再对RuO2复合薄膜进行二次热处理.扫描电子显微镜(SEM)观察显示, 随着热处理温度的升高, 薄膜表面多孔结构增多, 达到了提高膜电极结构孔隙分布的目的.能量分散谱(EDS)和X射线光电子能谱分析(XPS)表明, 薄膜中无定形RuO2·xH2O的存在保证了膜电极的大比容量.电化学性能测试结果表明,经105℃处理后的膜电极电化学性能最佳,比电容为28.5 mF/cm2,能量密度为0.04 Wh/m2,功率密度为14.25 W/m2.采用分步电沉积方法制备出的RuO2复合薄膜是一种良好的MEMS超级电容器电极材料.%To address the issue that RuO2 was difficult to deposit directly on the micro-3D-structure metal current col-lector due to its high deposition potential, this study was engaged to prepare RuO2 composite film by the fractional electro-deposition method. PPy/GO film was firstly deposited on nickel current collector as substrate, then RuO2 parti-cles were deposited on the substrate after heat-treatment, finally the RuO2 composite film was carried on a second heat-treatment. By means of scanning electron microscope (SEM), it can be found that the porous structures of RuO2 composite film multiply with the increase of heat-treatment temperature, so that the pore structure of the membrane electrode is improved. By means of X-ray energy dispersive spectroscope (EDS) and X-ray photoelectron spectroscope (XPS), the results indicate that there exists amorphous RuO2·xH2O in the film, which ensures the great specific capac-ity of the membrane electrode. The electrochemical testing results indicate that the electrochemical performance of membrane electrode is optimal when heat-treatment temperature reaches 105℃, with specific capacitance of 28.5 mF/cm2, energy density of 0.04 Wh/m2 and power density of 14.25 W/m2. The RuO2 composite film prepared by using step-by-step electro-deposition method is a type of excellent electrode material for micro-supercapacitor.
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