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Methods of making supercapacitor cells and micro-supercapacitors
Methods of making supercapacitor cells and micro-supercapacitors
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机译:制备超级电容器电池和微型超级电容器的方法
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摘要
This invention provides a micro-supercapacitor with high energy density and high power density. In some variations, carbon nanostructures, such as carbon nanotubes, coated with a metal oxide, such as ruthenium oxide, are grown in a supercapacitor cavity that contains no separator. A lid is bonded to the cavity using a bonding process to form a hermetic seal. These micro-supercapacitors may be fabricated from silicon-on-insulator wafers according to the disclosed methods. An exemplary micro-supercapacitor is cubic with a length of about 50-100 μm. The absence of a separator translates to higher energy storage volume and less wasted space within the supercapacitor cell. The energy density of the micro-supercapacitor may exceed 150 J/cm3 and the peak output power density may be in the range of about 2-20 W/cm3, in various embodiments.
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机译:本发明提供了一种具有高能量密度和高功率密度的微型超级电容器。在一些变型中,涂覆有金属氧化物(例如氧化钌)的碳纳米结构(例如碳纳米管)在不包含隔板的超级电容器腔中生长。使用结合工艺将盖子结合到腔体上以形成气密密封。这些微型超级电容器可以根据所公开的方法由绝缘体上硅晶片制成。示例性的微型超级电容器是立方的,其长度约为50-100μm。缺少隔板将转化为更高的能量存储量和更少的超级电容器单元空间。微型超级电容器的能量密度可能超过150 J / cm 3 Sup>,峰值输出功率密度可能在2-20 W / cm 3 Sup>的范围内,在各种实施例中。
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