采用直流磁控溅射法在透明导电玻璃FTO上制备了表面平整、致密度高的Ti膜，经过在含氟化物电解液中的阳极氧化过程后得到了垂直于FTO的高度有序的TiO2纳米管阵列.通过调节阳极氧化反应过程中的电压、温度参数，得到了一系列具有不同孔径、壁厚、长径比、管密度的TiO2纳米管阵列，从扫描电镜（SEM）的结果中可以得出，TiO2纳米管的各项管参数与反应条件电压、温度呈线性关系.其中，氧化电压对纳米管管径起主要影响作用，管内径由49.3 nm至75.3 nm连续可调，而温度对纳米管壁厚起明显作用，管壁厚度从11.6 nm变化到38.1 nm.由此得到的多尺寸TiO2纳米管阵列对前入式光照的光伏器件的应用具有重大意义.①%Vertical aligned crystalline TiO2 nanotubes on FTO- coated glass were obtained from anodization of DC sputtered Ti films in ammonium fluoride containing ethylene glycol solutions. The films were studied using scanning electron microscopy (SEM) after anodization. The influence of different anodization parameters such as applied voltage or anodization temperature was systematically analyzed revealing that controllable synthesis over tube diameter,spacing,and tube wall thickness is possible. Furthermore,the inner tube diameters can be tuned using different voltages,and it ranges from 49.3 nm to 75.3 nm flexibly. Tube wall thickness can be controlled via the anodization temperature,varies from 11.6 nm to 38.1 nm. The desirable TiO2 nanotubes can be successfully used in the fabrication of photovoltaic devices via frontside illumination.
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