扫描隧道显微镜中的扫描驱动器的特性改善

摘要

概述了扫描隧道显微镜的工作原理，介绍了采用压电材料的扫描控制方案及获取样品表面形貌信号的方法，给出了系统中的z扫描驱动器，xy扫描驱动器的非线性修正及动态特性的改善．并研制出一种可微机控制的精密高压调节器，与单片机数字系统相配合，形成一个完整的数字-模电路结合控制系统，用以实现扫描驱动器动态性能的改善．%In this paper, we summarized the principle of STM, introduced a method which used piezoelectricity material to scan and control project and obtained sample exterior signal,and we give out z drive of the system,and the non-linearity of xy drive is abated and its dynamic characteristic is improved. A precise high-voltage adjustor is designed,which can be controlled by a microcomputer, and it cooperates well with digital hardware system and forms a integrated and pratical control system to improve the characteristics of the drive of SIM.