离子交换法制备铒镱磷酸盐波导光放大器

摘要

采用离子交换法制备铒镱共掺磷酸盐波导光放大器,实验研究交换熔盐中的Ag离子浓度和交换时间对波导折射率和深度的影响.首先通过微电子的一些基本工艺制备8μm,10μm以及12μm宽度的Al条形掩模,并根据不同的AgNO3浓度以及不同的交换时间得到不同的波导深度样品.然后在光学位移平台上对制备的条形波导进行测试,其中10μm宽,6μm深的条形波导的信号光输出功率为9μW,信号光净增益达3.0dB/cm.%Erbium ytterbium co-doped phosphate waveguide amplifier was prepared by ion exchange method.The effects of Ag ion concentration and exchange time on the refractive index and depth of the waveguide were investigated.The 8μm, 10μm and 12μm width Al strip mask were fabricated by the basic technology of microelectronics, and the different waveguide depth samples were obtained according to different AgNO3 concentration and different switching time.At last, the channel waveguides were measured on the optical displacement platform.The signal output power was about 9μW and the net gain was 3.0dB/cm for 10μm width, 6μm depth channel waveguide.