以钡、锶和锰醋酸盐为原料,采用新型溶胶-凝胶法制备锰掺杂4%mol、Ba/Sr分别为60/40、65/35和70/30的纳米粉体,均匀分散于组分相同的BST溶胶中,形成稳定的厚膜先体凝胶.浓度0.4mol/L钛酸钡凝胶薄膜种子层,作为不同组分厚膜之间的中间夹层.利用旋转涂覆工艺在LNO/Pt/Ti/SiO2/Si复合底电极上,制备出厚度约为6～10μm的BST介电增强型夹层厚膜.XRD测试结果表明,650℃热处理2h后的夹层厚膜为单一钙钛矿相,750℃热处理后2h的夹层厚膜在室温、环境温度25℃、频率1kHz下相对介电常数εγ和介质损耗tanδ分别约为1200和0.03,室温25℃附近较宽范围介温变化率>1.2%/℃,BST夹层厚膜无裂纹出现,表面平整,致密,是制备大阵列非制冷红外焦平面阵列(UFPA)的优选材料.%The stable precursor gel of thick film is formed by uniform dispersion of nano-powder into the BST sol. The nano-powder is obtained by a new sobgel method by means of 4mol% Mn doping,with Ba,Sr and man-ganese acetate as raw materials. In addition, Ba/Sr ratio is 60/40,65/35 and 70/30, respectively. The BST thin film of with 0.4mol/L concentration is used to be the interlining between the thick films with different compo-nents. The BST dielectric-reinforced interlining thick film of around 6-10μm thickness is made in the composite LNO/Pt/Ti/SiO2/Si bottom electrode by spin-coating process. The XRD measurement shows that the interlin-ing thick film by 2h heating treatment at 650℃ is a single perovskite phase. The relative dielectric constant εγand dielectric loss tan δ of the interlining thick film by two-hour heating treatment at 700℃ are approximately 1200 and 0. 03 in the case of 25℃ and lkHz, respectively. The dielectric-temperature change rate is over 1.2%/℃ within a wide range near 25℃. The surface of BST interlining thick film is very smooth and compact without any fracture. Thus, the BST interlining thick film is seen as the preferable material for large UFPA.
展开▼
