简述了微束分析仪器电子探针(EPMA)和扫描电镜(SEM)的原理和功能,对比了波谱仪(WDS)和能谱仪(EDS)的差异.使用这两类仪器对稀土镁合金、铝合金焊接区域及镍合金渗碲实验样品进行了测试和分析.结果表明镁合金中稀土的分布主要富集于晶界但不连续;铝合金焊接区域的元素存在局部偏聚现象;碲在镍基合金晶界富集,并沿着晶界向基体扩散.这些不同类金属的元素分布特征都可以在EPMA的面分析结果上直观体现出来.同时对比了EDS和WDS的性能,在微区分析中WDS的分辨率和灵敏度均较EDS更有优势.%Electron probe micro analysis ( EPMA) and scanning electron microscopy ( SEM) are briefly described in the aspects of principle and function, and the differences of wavelength disperse spectroscopy ( WDS) and energy disperse spectroscopy ( EDS) are detailedly compared. Experiment samples of rare earth magnesium alloy, welding aluminum alloy and nickel alloy with tellurium diffused are tested and analyzed by using two kinds of instruments. The results show that the distribution of rare earth elements in magnesium alloys is mainly discontinuity along the grain boundary. The elements in welding area of aluminum alloy exists local aggregation phenomenon. Tellurium in nickel base alloy is enrichment in the grain boundary and diffuses along grain boundary to substrates. Element distribution characteristics of multi-metals can be intuitively obtained by the analysis results of EPMA. Meanwhile, by comparing the properties of EDS and WDS, WDS is proved to have better resolution and higher sensitivity in the field of microanalysis.
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