一种小型在线非接触球面干涉仪系统设计

摘要

With the aim to measure the radius of curvature deviation of spherical lens online in workshop, based on the laser testing technique, a solution of miniaturization sphericity interferometer system without precision guide was proposed, and the principle of the system was analyzed. After the analysis by Zemax simulation, the system could get the astigmatic and local deviation of lens, and measure the radius of curvature deviation fast. The results show that the precision of radius of curvature deviation is better than 0. 01 %. Compared with the existing sphericity interferometers, the new system is particularly fit for noncontact online testing in workshop, and has advantages of compact structure, no precision guide, high efficiency and low costs.%为了实现车间球面镜片的半径偏差的在线无损检测,基于激光检测技术,提出了一种无需精密导轨的小型球面干涉仪系统的设计方案,并对整个系统的检测原理进行了分析.通过Zemax软件模拟的分析验证,该系统不仅可以测出球面面形的像散偏差和局部偏差,而且还可以快速测出球面镜的半径偏差,其演算测得的曲率半径精度优于0.01％.与目前已有的球面干 涉仪相比较,具有系统结构紧凑、无精密导轨、操作效率高和低成本的特点,特别适用于车间的在线非接触检测.