浅议国内外超净高纯氢氟酸工艺技术差异

摘要

集成电路是资本密集、技术密集型行业,同时又长期遵循着著名的“摩尔定律”,对企业在技术实力和研发投入上有着严苛的要求,相应对原料蚀刻剂超净高纯氢氟酸产品质量也有苛刻要求.从市场需求方面引出国内企业与国外企业的超净高纯氢氟酸质量差异,又详细对比分析了国内企业和国外企业执行标准的差异和原因以及工艺技术制备的差异,末尾结合集成电路的市场状况说明了中国超净高纯氢氟酸制备的发展趋势,以此来促进国内半导体产业的发展.%The integrated circuit industry is both a capital and technology intensive industry,and long-term follows the famous Moore's Law.It has stringent requirements on enterprises' technical strength and R&D investment.Correspondingly,it also has harsh conditions on the product quality of super-clean and high-pure hydrofluoric acid,the raw material of etching agent.From the market demand,the quality difference of super-clean and high-pure hydrofluoric acid between domestic and foreign enterprises was introduced.The difference of executive standards between domestic and foreign enterprises and the reasons,as well as the difference of preparation technology were comparatively analyzed in detail.Finally,the development trend of super-clean and high-pure hydrofluoric acid in China was pointed out according to the market situation of integrated circuit,so as to promote the development of the domestic semiconductor industry.