基于MEMS技术的EFI芯片起爆HNS-Ⅳ炸药试验研究

摘要

采用MEMS技术制备了一体化集成的EFI芯片,研究了EFI芯片起爆HNS-Ⅳ炸药的能力,试验结果表明在起爆电压高于2 400V下EFI芯片能够成功起爆HNS-Ⅳ炸药,并且可靠地剪切出飞片.设计了3种桥箔和加速膛尺寸匹配关系的EFI芯片,用兰利法测试其发火感度.结果表明桥箔尺寸为0.3mm×0.4mm、加速膛直径为0.3mm时,EFI试验件的发火感度最高,50％发火电压为1 928V,全发火电压为2 013V.%The MEMS technology was used to prepare an integrated EFI chip,and the ability of EFI chip initiating HNS-Ⅳ explosive was studied.The test results showed that the EFI chip can successfully initiate HNS-Ⅳ explosives,and can shear a flyer reliably under 2 400V voltage.Three kinds of EFI chip with different foil and barrel size matching was designed,and their firing sensitivity was tested with the Langlie method.It showed that when the size of the bridge foil is 0.3mm×0.4mm,and the barrel diameter is 0.3mm,the firing sensitivity of the EFI is the highest,the average firing voltage is 1 928V,the full firing voltage is 2 013V.