国产640×512非制冷氧化钒红外焦平面探测器的研制

摘要

Uncooled infrared focal plane array(FPA)can be used in aiming, detecting, monitoring, searching and rescueing. This paper discusses the main designing method and parameters of 640×512(20μm)VOx uncooled infrared FPA produced in North Guangwei Technology Inc., including MEMS structure developing, read-out circuit designing, vacuum encapsulation and so on. Through parameters testing and imaging test, the performance of this product is proved to satisfy the civil and military use.%非制冷红外焦平面探测器可以应用到红外瞄准、红外侦查、安防监控、消防搜救等多领域。论述了国产640×512（20μm）氧化钒非制冷红外焦平面热辐射传感器的主要设计方法及技术参数，包括MEMS结构开发、读出电路设计、真空封装等关键技术，最终通过参数测试、车载成像验证了国产氧化钒非制冷红外探测器的性能指标可以满足民用、军用等领域的需求。