MEMS红外光源定向辐射结构设计与分析

摘要

In this paper, a double convex surface radiation collimating lens for MEMS infrared source is designed with high infrared transmission material CaF2. The highlight of the lens is to bring out infrared light convergence to collimating radiation, which is the key of improving infrared light radiation efficiency and the nature of making high performance infrared system. According to MEMS infrared source encapsulation, the lens aperturer=6.48mm; focal lengthf=7.2mm; lens thicknessd≤2mm. Moreover, after simulation and optimization by Zemax optical software, it is concluded that the middle layer thicknessd is 0.309mm. In addition, by simulation analysis the converging optical path and the result verification, the optimal size parameters are provided in the MEMS infrared source research , which can dramatically improve the design efficiency.%红外光源辐射利用率是制造高性能红外系统的关键，准直透镜因其减少红外光源的广角散射而大幅提高红外光源利用率。针对MEMS红外光源设计CaF2高红外透射材料的双凸曲面结构准直辐射透镜，使红外光线收敛呈准直辐射；由MEMS红外光源封装确定透镜最佳口径r＝6.48 mm，透镜焦距f＝7.2 mm，透镜厚度d≤2 mm，用Zemax光学软件仿真优化，得出中间层厚度d＝0.309 mm。并进行透镜的聚光光路仿真分析和效果验证，为定向辐射 MEMS 红外光源研发提供最优的原型尺寸参数，极大提高设计效率。