MEMS红外光源光谱特性及温度特性测试研究

摘要

MEMS红外光源是基于微机电系统(MEMS)制造工艺的红外光源器件,为明确MEMS红外光源的辐射光谱分布特性和温度特性,采用SR5000光谱辐射计对MEMS红外光源进行辐射光谱分布特性测试,所得数据表明所选光源的红外光谱分布主要在3~5μm之间,中心波长位于3.6μm,该波段红外光具有接近90%的大气透过率;采用红外测温仪和热敏电阻对光源辐射体温度进行测试,结果显示所选MEMS红外光源温度特性优良,适用范围广泛.%MEMS infrared light source is based on micro-electromechanical system (MEMS) fabrication technology. To clarify the radiation spectral distribution characteristic and temperature characteristic, a SR5000 spectrora diameter was adopted for testing MEMS infrared light radiation spectral distribution. The results show that the infrared spectrum of the light source selected mainly distributes between 3-5 μm, and the center wavelength is at 3.6 μm. The infrared thermometer and thermistor had been taken to test the light radiation temperature. The results show that the temperature characteristic of the selected MEMS infrared light source is excellent, and the light source has a wide scope of application.