The spatial resolution model of KBA X-ray microscope is built, taking into account geometrical aberration, diffraction effect, etc. Through ray-tracing, the edge response function(ERF) of different fields of view is got, and the geometrical aberration resolution based on the criterion of the ERF between 20% and 80% of its peak-valley value is determined. According to our model, the ideal resolution is obtained. In all the field of view, the geometrical aberration resolution, ideal resolution and experimental resolution are in good agreement. Using the X-ray image from the single film KBA microscope, the resolution is calculated to be about 4 um in central field and better than 6um in ±100 um range. The experiment result shows that, geometrical aberration is the key factor that determines the spatial resolution.%综合考虑了几何像差、衍射效应和加工精度等因素对KBAX射线显微镜分辨力的影响,构建了分辨力模型.通过光线追迹模拟得到了不同视场位置的边缘响应函数,以20％～80％的评价标准确定了几何像差分辨力.由构建的空间分辨力模型得到理论分辨力.KBA X射线显微镜整个视场几何像差分辨力、理论分辨力和实测分辨力基本一致.用单层膜KBA显微镜获得的X射线成像结果,得出中心视场的分辨力约为4μm,±100 μm视场的分辨力优于5μm.实验结果表明,几何像差对空间分辨力影响权重相对较大,是影响空间分辨力的决定性因素,其它因素的影响相对较小.
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