软X射线KBA显微镜分辨力及其影响因素

摘要

The paper investigates the resolution of soft X-ray KBA microscope and analyzes its influencing factors, including diffractive effect, geometrical aberration, slope error and surface roughness of specula. A calculation model of the KBA microscope is obtained according to these analyses. A 2. 5 keV X-ray imaging experiment is performed and the resolution agrees with the simulated data of the model in large visual field. The incompleteness of this model is also analyzed.%为了对KBA显微镜的分辨能力进行准确计算,对KBA显微镜的分辨力和影响因素进行了研究,分析了衍射效应、几何像差,面形误差和粗糙度等因素对分辨力的影响,以此为基础建立了KBA显微镜的分辨力计算模型,并模拟了KBA显微镜的分辨力与视场的关系.用KBA显微镜获得了2.5keV能量的X射线成像结果,中心视场范围的分辨力约为6μm.通过实验结果与模型模拟的对比,可得建立的模型对KBA显微镜分辨力与视场尺寸的关系的描述与实际测试的结果基本符合,并对不完善之处进行了分析.