采用模态法分析了矩形亚波长石英闪耀光栅的设计原理,给出了1.06 μm工作波长的矩形亚波长石英闪耀光栅的设计示例.研究表明,要设计性能优良的-1级透射闪耀光栅.应使0/1阶传输模的累积相位差为Ⅱ的奇数倍.设计的透射闪耀光栅能够使TM偏振光和TE偏振光获得近100%的-1级衍射效率,且具有较大的加工容差,较宽的入射波长和人射角变化适应范围.%The design of fused silica transmission blazed grating based on modal method is presented under Littrow mounting. A -1st transmitted order blazed grating is designed at the wavelength of 1.06 μm. The first two modes (i. e. mode 0 and mode 1) propagate through the grating with different effective indices and couple out at the grating-substrate interface. And a high diffraction efficiency of -1st transmitted order can be achieved if the first two modes have a phase difference of odd multiple of π.The diffraction performance of the blazed grating is analyzed by the rigorous coupled-wave analysis theory. The design of blazed grating based on modal method matches the analysis perfectly.
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