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Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating

机译:制造闪耀光栅的方法,例如闪耀光栅和具有这种闪耀光栅的光谱仪

摘要

In a method for manufacturing a blazed grating from a prefabricated initial blazed grating, a blazed grating the substrate of a first material of which has a surface, which has an initial surface profile having an initial blaze angle, is provided. An auxiliary layer of a second material is applied onto the surface of the substrate, wherein the second material is different from the first material. The auxiliary layer is removed at least partially by means of etching, wherein the etching is carried out at least until the etching simultaneously acts on the auxiliary layer and on the initial surface profile of the substrate. A ratio between an etching rate for the auxiliary layer and an etching rate for the substrate is adjusted such that the initial blaze angle is reduced to a final blaze angle. Further, a blazed grating manufactured in that way and an optical device having such a blazed grating, are described.
机译:在一种由预制的初始闪耀光栅制造闪耀光栅的方法中,提供了一种闪耀光栅,该闪耀光栅的第一材料的基底具有其表面,该表面具有具有初始闪耀角的初始表面轮廓。将第二材料的辅助层施加到衬底的表面上,其中第二材料与第一材料不同。通过蚀刻至少部分地去除辅助层,其中,至少进行蚀刻,直到蚀刻同时作用于辅助层和基板的初始表面轮廓上为止。调整辅助层的蚀刻速率和基板的蚀刻速率之间的比率,以使得初始闪耀角减小到最终闪耀角。此外,描述了以这种方式制造的闪耀光栅和具有这种闪耀光栅的光学装置。

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