结合光学元件镀膜工艺中对镀膜机冷却循环水系统的要求，从冷却循环系统稳定性，系统运行的节能性，系统的水质、水压、水温等方面介绍冷却循环水系统的设计。同时通过对冷却循环水的供水系统方案的比选，优化冷却循环水系统设计。镀膜机冷却循环水的设计不仅要满足现有工艺要求，还要适应未来生产工艺变化，系统设计留有余量。%Considering the demands of cooling circulation water system of optical components coating process in coating machines , desig-ning of cooling circulation water system including the stability of the cooling circulation system , energy saving of the system operation , wa-ter quality, water pressure, water temperature and so on is introduced .Different schemes of water supply systems of cooling circulating wa-ter have been compared and selected and the design would be stated further .The design of cooling circulation water in coating machines should meet not only the needs of existing process , but also future process changes , leaving some margin for further design .
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