采用 Zygo 干涉仪测量 LCOS 相位调制特性的研究

摘要

This paper introduces the basic structure and light wave modulation principle of liquid crystal on silicon(LCOS)de-vice.When the polarization direction of light wave is accordant with the optic axisof liquid crystal polymer,LCOS is under phase -only modulation model.This paper also introduces the principle of Zygo interferometer phase -difference measurement,measures the phase modulation characteristics with American Zygo interferometer of RL -SLM-R2 reflection pure -phase LCOS produced by Beijing Re-allight Technology Co.,Ltd,revises the measuring results according to the interferometer principle,and gets the accurate phase char-acteristic curve,of which the modulation range is 0 -0.7154λ.This experiment creates a new method for measuring phase modulation, which can help better utilize LCOS.%该文介绍了 LCOS 的基本结构和光波调制原理，当光波的偏振方向与液晶分子的光轴相一致时，LCOS 处于纯相位调制模式。介绍了 Zygo 干涉仪测量相位差的原理，针对北京杏林睿光公司生产的 RL －SLM－R2反射式纯相位 LCOS 采用美国 Zygo 干涉仪进行了相位调制特性测量，并根据干涉仪原理对结果进行修正，得到了准确的相位调制特性曲线，其调制范围为0～0．7154λ。该实验开创了一种新的相位调制度测量方法，对更好地使用液晶空间光调制器有重要意义。