遗传算法在湿法刻蚀设备温度PID控制中的应用

摘要

In the wetetching process, the reason of etching speed and effect is very more, temperature is the key factor, the controlling of temperature precision is the one of important technology. The method of control temperature is PID control process basing on the genetic algorithm in this article, and this method obtains very wellresult in the simulation and actualapplication.%在湿法刻蚀的工艺过程中，影响刻蚀速度和刻蚀效果的元素有很多，温度是其中一个关键因素，所以在湿法刻蚀设备研制中对温度精度的控制成为重要技术之一。使用基于遗传算法的PID 控制方法来实现对温度的控制，进行仿真以及和传统PID 控制比较，在实际应用中得到了很好的结果。