表面粗糙度测量显微系统的技术分析和不确定度评定

摘要

Laser micro system,based on scanning confocal principle,conforms to the trend of development that puts forward higher request to the field of precision machining, because of its advantages of easy positioning,accurate measurement of micro profile,high resolution.The article analyzes laser micro system working principle of measuring surface roughness roundly based on scanning confocal principle and makes a concrete analysis of the key technology.We have studied the influence of the repeatability of measurement, instrument error,calibration uncertainty of standard gauge block and temperature on precision measurement experiment.Therefore,we offer a method in order to improve the measurement conditions by using special materials,instruments and laser micro measurement uncertainty is assessed.The final results show that this research can be widely used in precision machinery processing industry,precision measurement and it has directive significance to the surface roughness measurement.%基于扫描共焦原理的激光显微系统因其容易定位、精确测量微型轮廓、高分辨率等优点，顺应了现代社会对机械精密加工领域提出了更高要求的发展趋势。本文全面分析了基于扫描共焦原理的激光显微系统测量表面粗糙度的工作原理，并进行了关键技术的技术分析。研究了测量重复性、仪器示值误差、标准量块校准不确定度、温度等因素对精密测量实验的影响，提出了选用特殊材料、仪器等措施改善实验测量条件的方法，对激光显微系统测量结果进行了不确定度评定。最终结果表明这一研究可以普遍用于机械精密加工行业精密测量，对表面粗糙度测量具有指导意义。