Tailoring the microstructure,mechanical and tribocorrosion performance of (CrNbTiAlV)N_(x) high-entropy nitride films by controlling nitrogen flow

摘要

The(CrNbTiAlV)N_(x)high-entropy nitride films were fabricated by adjusting nitrogen flow via magnetron sputtering.The microstructure,mechanical,electrochemical and tribocorrosion performances of the films were studied.The results show that the films transform from amorphous to nanocrystalline structure as nitrogen flow increased.The nanocrystalline films show super hardness(>40 GPa)and adhesion strength(>50 N).The amorphous film has a pretty anti-corrosion in static corrosion,while not in tribocorrosion condition.The film deposited at nitrogen flow of 38 sccm exhibits the optimal tribocorrosion performance in artificial seawater,with the highest open circuit potential(∼−0.1 V vs.Ag/AgCl),the lowest friction coefficient(∼0.162)and wear rate(∼7.48×10^(−7)mm^(3)N^(−1)m^(−1)).