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机译:Microstructure and properties of the AlCrMoZrTi/(AlCrMoZrTi)N multilayer high-entropy nitride ceramics films deposited by reactive RF sputtering
School of Mechanical Engineering Henan University of Engineering;
School of Physics Key Lab of Materials Physics Zhengzhou University;
Faculty of Engineering Huanghe Science and Technology College;
High-entropy nitride ceramics film; Mechanical property; Microstructure; Modulation period; Tribological behavior;