25 × 50 Gbps wavelength division multiplexing silicon photonics receiver chip based on a silicon nanowire-arrayed waveguide grating

摘要

A high-performance monolithic integrated wavelength division multiplexing silicon(Si) photonics receiver chip is fabricated on a silicon-on-insulator platform. The receiver chip has a 25-channel Si nanowire-arrayed waveguide grating, and each channel is integrated with a high-speed waveguide Ge-on-Si photodetector. The central wavelength, optical insertion loss, and cross talk of the array waveguide grating are 1550.6 nm, 5–8 dB, and-12 –-15 dB, respectively. The photodetectors show low dark current density of 16.9 mA∕cm^2 at-1 V and a high responsivity of 0.82 A/W at 1550 nm. High bandwidths of 23 and 29 GHz are achieved at 0 and-1 V, respectively. Each channel can operate at 50 Gbps with low input optical power even under zero bias,which realizes an aggregate data rate of 1.25 Tbps.