平膜片式压力传感器有限元分析

摘要

本文用有限元方法分析平膜片式压力传感器弹性元件表面径向应变及切向应变与薄膜应变片阻值变化的联系后，根据电桥原理得到与其输出电压之间的关系，最终并分析了传感器之非线性精度.%After the relationship between radial and tangential strains and resistance changes of strain gage on the surface of elasticity pressure sensor is established by finite element method, the output voltage is related to the resistance changes in the electrical bridge, and the nonlinear precision of this kind of pressure sensor is analyzed.