基于ZnO传感器的高流速气体压力测试

摘要

针对机械系统中气体轴承间气膜压力的分布检测,提出并研发了一种基于ZnO传感器的检测方法.ZnO纳米颗粒敏感材料采用化学沉淀法制备；用X射线衍射和扫描电镜对其进行了表征.利用ZnO传感器的响应电压与动态气体压力的关系,成功测试出高压动态气体的压力.分析了氧气吸附、压电效应和热传导对响应电压的影响,拟合出对应的气体压力-响应电压关系曲线,本研究为高流速气体压力的测试提供了一种新途径.%A new measure method based on ZnO sensors was brought forward and devised to detect and measure the gas pressure distribution for mechanical system gas bearing film pressure. ZnO nanopowder was prepared by chemical precipitation method,and characterized by XRD and SEM. High-pressure gas was detected successfully and the pressure-output voltage curve was draw according to the oxygen chemisorption, piezoelectric effect and heat conduction mechanism. A new method was draw for measuring the gas with high pressure and flow rate.