基于飞蛾触角的仿生MEMS导航传感器的设计与仿真

摘要

以飞蛾触角导航为仿生依据,通过建立其导航数学模型,利用MATLAB对该模型的导航原理进行仿真分析,结合仿生学,设计了一种新型MEMS 三维角速度传感器模型,并对该传感器的加工工艺进行了设计,该传感器主要由折叠梁和坡莫合金棒组成,通过ANSYS分析,在9V驱动电压的作用下,合金棒沿X、Y的振动幅度可达到80μm,通过理论计算,由偏航角速度产生的哥氏力为0.908×10-8N/(°·s-1),由翻滚和俯仰角速度产生的哥氏力为0.18×10-9 N/(°·s-1).%Based on bionic antennae navigation,a Mathematical model of navigation was established. The navigation principle of its model was analyzed with MATLAB. Combined with bionics, a novel MEMS sensor measuring three-dimensional angular rate was designed. A fabrication process method of the novel MEMS sensor was presented. The structure of the sensor mainly composed of folded beams and permalloy rod. By ANSYS analysis, the vibration amplitude of the permalloy rod along the X and Y axis can reach 80 μm, when the drive voltage is 9 V. Through theoretical calculations,the Coriolis force generated by azimuth rate is 0. 908×l0-8 N/(o·S-1) ,and Coriolis force produced by the roll and pitch rate is 0. 18×10-9 N/(°·s-1).