泥沙掩埋对压阻式压力传感器的影响及其对策研究*

摘要

为了研究泥沙掩埋对压阻式压力传感器的影响，对传感器在不同泥沙、不同掩埋深度下的动态特性进行了测量，发现泥沙掩埋前后及不同泥沙和不同掩埋深度时，传感器输出动态特性有较大差异，对此解释了其产生的原因，并利用机电等效模型建立了泥沙掩埋时的压力传递模型，在此模型基础上，提出了减小泥沙掩埋下传感器输出特性变差的方法，最后利用试验验证了此方法可较好地减少泥沙掩埋对传感器的影响。%The pressure sensor may be buried by the sediment owing to the effect of ocean current and tide when it is utilized to measure the pressure signal on the bottom of sea. In order to study the effect of the piezo-resistive pressure sensor when buried by sediment,a large number of tests have been finished,the results show that the output characteristics of the piezo-resistive pressure sensor buried by sediment has been changed worse relative to not buried by sediment. A method has been proposed to reduce the effect caused by sediment buried, and the effectiveness of the method is verified by the real tests.