MEMS数字倾角仪的标定补偿方法研究

摘要

在介绍MEMS数字倾角仪组成结构的基础上，根据数字倾角仪内部MEMS加速度计的输出特性，对MEMS加速度计的敏感单元建立数学标定模型，提出并推导了一种适用于MEMS数字倾角仪的标定方法；该方法可以得到双轴MEMS数字倾角仪中加速度计的零位电压、标度因数矩阵、安装误差系数等敏感项参数；通过重力场静态翻转实验对实验室研制的数字倾角仪进行标定；最后使用MATLAB拟合计算得到所求标定参数，并对测试结果进行了误差分析和补偿对比；实验结果表明，该方法能使MEMS数字倾角仪的测量精度提高到±0.05°，可以满足高精度的角度测量需求。%Based on the MEMS digital inclinometer,this paper establishes a calibration model for MEMS accelerom⁃eter sensing element and deduces a calibration method by means of analyzing the output characteristic of MEMS ac⁃celerometer in inclinometer. The calibration method is a gravity field static rolling experiment,offering the zero bias voltage and scale factor matrix,the installation error coefficients and other sensitive parameters at the same time. From the result of the test,the error analysis and compensation comparison shows that the measurement accuracy up to±0.05 degrees. The method meets the demand of high precision of angle measurement.