纳米线机械性能测试中,常见MEMS器件大都采用焊接或沉积方式固定纳米线,限制了器件寿命和测试重复性.针对焊接方式测试的不足,设计了一种非焊接式纳米线机械性能测试MEMS器件.在静电叉指和支撑梁结构的基础上,设计了利用梁刚度差进行夹紧和拉伸操作的结构,其中设计了V型结构以避免焊接纳米线.利用有限元仿真软件进行了仿真验证,确定了最优结构尺寸,V型缝隙夹角小于22.5°时能满足纳米线机械性能测试要求,所设计器件提高了测试器件的重复利用率.%In researches about mechanical properties of nanowires,welding methods,such as FIB and EBID which are most common methods used to fixed nanowires,reduce devices lifetime and repeatability. In order to overcome the shortcomings of the welding method,a new MEMS device without need of welding or depositing was designed in this paper. Basing on the electrostatic interdigital structure and bearing beam structure,a clamping and stretching structure using the rigidity difference was designed,in which a V-shaped structure is designed to avoid welding or depositing. It was simulated and validated by FEA, and the optimal structure was obtained. When the angle of V-shaped gap is less than 22. 5°, it can meet the requirements of the mechanical properties of nanowires, and improve application repeatability.
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