High orientation Al films growth on LiNbO3 single crystal and its adhesion

摘要

High orientation Al films were deposited on 64°Y-XLiNbO3 substrate by DC magnetron sputtering and the influence of deposition temperature on microstructure and adhesion properties of Al films were investigated. The results show that crystallographic orientation of films varies with substrate temperature and the adhesion strength between LiNbO3 and Al films strongly depends on crystallographic orientation of Al films. The (111) orientated Al films shows stronger adhesion strength to LiNbO3 substrate than (100) orientated films. There is an optimum substrate temperature of 60 ℃ and hardening temperature of 200 ℃ for obtaining high (111) orientated Al films with good surface structure and adhesion property. Using this Al film, we have successfully fabricated the SAW filters with high frequency of about 1.89 GHz.