粉浆浇注制备大尺寸ITO靶材工艺

摘要

研究分散剂、pH值和固相含量对铟锡氧化物(ITO)浆料稳定性、流变性的影响，以及粉浆浇注压力对坯体密度的影响。结果表明：当聚丙烯酸(PAA)质量分数为0.5%、聚乙二醇(PEG)质量分数为1.5%、pH值为9、ITO固相含量为70%(质量分数)时，调制的浆料的流变性和稳定性最佳，并在注浆压力为1.5 MPa的条件下制备出相对密度为68%的高密度粉浆浇注坯体；对该素坯进行常压烧结制备了相对密度高于99.5%的ITO靶材。对靶材的组织与成分分析发现，粉浆浇注ITO靶材的结构为氧化锡完全固溶于氧化铟的单一立方In2O3结构，同时In、Sn和O元素分布均匀，无元素富集现象，晶粒尺寸均匀，完全满足八代以上镀膜线的应用技术要求。%The effects of additives, pH value and solid content on the stability and rheology of indium tin oxide (ITO) slurry were studied, and the effect of slip casting pressure on the bulk density was investigated. The results show that the slurry with 70% ITO solid content (mass fraction) is very stable and easy to form the ITO green-body with a relative density of 68% under casting pressure of 1.5 MPa when the parameters of forming slurry are fixed at w(PAA)=0.5%(PAA is polyacrylic acid), w(PEG)=1.5%(PEG is polyethylene glycol) and pH=9. The ITO target materials with relative density higher than 99.5%are achieved using the green-body mentioned above by pressureless sintering. The structure of ITO target material is the cubic structure of indium oxide, and the grain size and the elements of In, Sn and O well distribute. The ITO target materials reach the quality for the application in G8 TFT-LCD production line.