白色光阻材料在O GS工艺中的应用

摘要

The chromaticity,resolution and adhesion strength of the white matrix materials for touch panel were analyzed at different conditions of temperatures,thickness and chemical solutions.Thus the white matrix materials were verified for one glass solution (OGS)process for touch panel.First, we focused our studies on the optical density (OD)value,resolution,chemical resistance and ther-mos-stability of the material with different thicknesses.The changes of chromaticity values at differ-ent thicknesses were studied.Then,we applied the white matrix material to the OGS touch panel process.In order to ensure the OD value being greater than 4�0 and make metal line on touch panel in-visible,we proposed a dual layer structure including white matrix layer and black matrix (BM)layer. The white matrix layer thickness was 1 5μm and the BM layer thickness was 1 .2μm.In the practical photo process,we adj usted the process parameters,such as increasing the photo-resistance thickness, exposure intensity and developing time,and successfully solved the metal open and metal remain prob-lems.In the end,the touch panel with white matrix and BM by OGS technology was demonstrated.%分析了白色光阻材料在不同温度、不同厚度和不同化学品浸泡下色度值、分辨率和附着力的变化情况.验证了白色光阻材料在 OGS(One glass solution)触摸屏生产中的工艺条件.首先,关注白色光阻材料的光密度值(OD值)、分辨率、耐化性、耐高温性能以及在不同厚度下白色光阻材料的色度变化.然后对白色光阻材料和触摸屏制作工艺进行工艺整合,提出了采用白色光阻加黑矩阵的双层结构,可以保证白色光阻材料的 OD值,防止后面的金属线被透视出来,其中白色光阻的厚度控制在15μm,黑矩阵的厚度在1．2μm.在后续的 Photo 工艺时,调整工艺参数,加大了 PR 的厚度并加大曝光显影时间,成功解决了这种高段差造成的金属线 Open和 Remain问题,并采用 OGS工艺制作了白色光阻触摸屏样品.