烧结过程中毛细作用对钌基厚膜应变电阻的影响

摘要

通过应用毛细作用的基本公式得到钌基厚膜应变电阻烧结阶段的模型.用Bi2O3和RuO2合成Bi2Ru2O7并进行试验,发现方阻随烧结时间和导电相粒径的增大而增大.用该模型解释了该现象,同时解释了导电相不同的体系,应尽导电相含量一样,但方阻不同,以及方阻随玻璃粘度增大而减小.%The fundamental formula of capillarity is employed on the Ru-based thick film strain resistors in the progress of sintering, and we got a mathematical model of this stage. Bi2O3 and RuO2 are synthesized to produce Bi2 Ru2 O7. This model can interpret the sheet resistance enhances with the aggrandizement of sintering time and the accretion of conductive particles radius. We also explain that, for two different conductive phase systems, although the conductive phase contents are identical, the sheet resistances are different and the sheet resistance reduces with aggrandizement of glass viscosity.