阳极氧化铝(AAO)模板法制作的直径和长度一致的碳纳米管

摘要

我们在铝衬底上制作了不同参数条件下的阳极氧化铝(AAO)模板.通过改变初次阳极化时间来得到不同尺寸的纳米孔.改变初次阳极化时间可容易地调节,而使用刻蚀技术又可以控制氧化铝孔的长度.在该研究中,控制阳极极化和刻蚀参量成功地制备了不同直径和不同长度的AAO纳米孔.在AAO模板的竖直沟道中生长了方向性强的碳纳米管,而AAO纳米孔的直径和长度可以控制这一过程.通过二次阳极极化法制备了有着六边形孔洞排列方式的纳米AAO模板.由于AAO纳米孔的直径和长度依赖于阳极化参量,故通过控制阳极化参量就可控制AAO纳米孔的直径和长度.%We fabricate the anodic aluminum oxide (AAO) templates of different parameters on the alumi-num substrates. In order to get nanopores with different sizes, we ascribe the variation of the first anodiza-tion time separately. The pore density with changing first anodization time can be easily to adjust, and the length of aluminum oxide pore were controlled using etching technique. In this study, the nanoporous AAO pore with different diameter and length have been successfully prepared by regulating anodization and etching parameter. Highly aligned carbon nanotubes (CNTs) were grown in vertical channels of the AAO template can be controlled by the diameter and the length of AAO pore. Nanoporous AAO templates with hexagonal pore arrangement were prepared by the two-step anodization of aluminum films, the size and the length of AAO pore can be varied because the diameter and the length of the AAO nanopores is dependent upon anodization parameters.