缠绕钨丝CVD钨管的组织及性能

摘要

为了提高CVD钨的强度和韧性,采用自制化学气相沉积装置,以WF6和H2为反应气体,在化学气相沉积钨过程中周期性地在基体上缠绕钨丝,沉积制备了钨丝- CVD钨复合材料.使用金相显微镜和扫描电镜(SEM)分别对沉积制备的钨丝-CVD钨复合材料涂层的显微组织和断口形貌进行观察和分析,使用X射线衍射仪(XRD)、电子能谱仪、密度测量仪、显微硬度仪和万能材料试验机分别测试分析了涂层的结构、成分、密度、显微硬度及压溃强度.结果表明:与不缠钨丝的CVD钨管相比,缠绕钨丝的CVD钨管中CVD钨晶粒得到了细化,择优取向基本消失；钨丝-CVD钨复合材料涂层具有较高纯度和致密度；钨丝-CVD钨管的压溃强度显著提高,断口形貌发生了明显的变化.%To improve the strength and toughness of CVD tungsten, the tungsten wire-CVD tungsten composite materials were fabricated by winding tungsten wire on the matrix periodically in the CVD process using the homemade CVD device, with WF6 and H2 applied as the reaction gases. The microstructure and fracture morphology of the composite materials were observed and analyzed by optical metallographic microscope and scanning electron microscopy (SEM). The structure, component, density, micro - hardness and crushing strength of the coating of composite materials were tested and analyzed by X-ray diffraction (XRD), energy dispersive spectroscopy(EDS), density measuring instrument, micro - hardness tester and universal material testing machine. The results show that the grains of CVD tungsten tubes wound by tungsten wire are refined compared with conventional CVD tungsten tubes, and their preferred orientation disappear. The coatings of the composite materials possess high purity and density, the crushing strength increases significantly, and the fracture morphology changes significantly.