陶瓷球表面类金刚石碳膜均匀沉积机构设计及运动仿真

摘要

在Si3N4陶瓷球表面沉积低摩擦因数的类金刚石碳膜，可以进一步降低陶瓷球轴承的摩擦因数。为了在陶瓷球表面均匀沉积类金刚石碳膜，设计了三沟道单自转盘和三自转盘两种镀膜机构，并且对陶瓷球在工装中的运动进行了仿真，在此基础上讨论了两种机构的镀膜均匀性。三沟道单自转盘镀膜机构的镀膜均匀性较好，该机构能在陶瓷球表面沉积均匀的类金刚石碳膜。%　　The friction coefficient of a bearing with Si3N4 ceramic balls can be reduced by depositing a diamond-like carbon (DLC) film on the ceramic ball surface. Two mechanisms of a single turntable with three raceways and three turntables are designed to uniformly deposit a DLC film on the ceramic ball surface. The movement of ceramic balls in the two mechanisms was simulated, and the deposition uniformity was discussed. The simulation result indicates that the DLC film can be uniformly deposited on the ceramic ball surface using the single-turntable mechanism.The measurementofDLCfilmsdepositedonceramic ballsconfirmsthesimulationresult.