注塑模具型腔表面阵列微结构的蚀刻技术

摘要

A simple mask was designed,and smooth rally micro-structure was researched.It is found that spray pressure is of significant influences on the micro-structure feature,the etching depth and undercut will increase per unit time when spay pressure is growing.Different processing method with controlled spay pressure was integrated to machine rally micro-structure,such as smooth rally micro salient and gradual depth rally micro-structure.Finally,a large rally smooth micro-structure with diameter of 200 μm,depth of 60 μm was machined.%设计了一种简单的掩模，并通过控制蚀刻液的喷淋压力进行了平滑阵列微结构研究。研究发现，蚀刻液喷淋压力对微结构的加工形貌有显著影响，蚀刻深度和侧蚀量随蚀刻液喷淋压力增大而增大。研究整合了多次加工和控制喷淋压力的工艺，得到了理想的无棱边棱角、结构均匀的深度渐变型阵列微凸结构。最终在注塑模具表面上加工出宽度为200μm、深度约60μm 的无棱边棱角、过渡平滑的阵列微结构。