高速动车组轴温测量用特种结构薄膜传感器的研制

摘要

针对高速动车组轴箱轴承温度变化迅速的特点,研制了一种以NiCr/NiSi薄膜为敏感材料的特种结构薄膜传感器.采用自行开发的标定系统对直流脉冲磁控溅射技术制备的薄膜传感器进行动静态特性标定,结果表明所研制的薄膜传感器在30～400℃内具有良好的线性度,其塞贝克系数为37.84μV/℃,非线性拟合误差小于0.7％,动态响应时间为53.72 ms.特种结构薄膜传感器磨损实验结果表明:传感器测温端的磨损对其温度测试的动静态特性影响很小,即测温端部分磨损不影响其测温性能.%According to the characteristics that axle box bearing temperature changed rapidly in high-speed electric multiple units,a kind of special structure thin-film sensors was developed,which adopted NiCr/NiSi thin-film as the sensitive materials prepared by DC pulsed magnetron sputtering technique.A self-developed calibration system was used to calibrate the static and dynamic characteristics of the sensors.The results show that the sensors have good linearity in the temperature ranges of 30～400 ℃,the Seebeck coefficient is as 37.84μV/℃ with a nonlinear fitting errors less than 0.7％ and the dynamic response time is as 53.72ms.The wear tests on the special structure thin-film sensors show that the wear of the sensor's thermo-junction has little influences on dynamic and static characteristics of temperature measurements.It means partial wears of temperature measuring ends of the sensors do not affect the test performances.